Multi-function Optical Profiling System - Model 7505-01

Key Features
  • 1D, 2D and 3D measurement capabilities
  • Equipped with film measurement function (1D) to do non-destructive film thickness measurement when penetrating reflection measurement is in use
  • Perform 2D defect measurement via high resolution line scan camera to check for bubbles, scratches and foreign objects
  • Use white light interferometry to perform 3D Profile measurement
  • Equipped with electric nose gear that can carry various kinds of objective lens for switch use via program control
  • Problem fixing algorithm for dark dots and boundary error 
  • Modular design on measurement needs and budget considerations with selection of parts
  • Measurement range covers 700 mm x 900 mm (smaller size is available as per request)
  • 3D measurements provides many parameters for surface measurement such step height, included angle, area, dimension, thickness, wave, film thickness and smooth level 
  • The stage has vacuum suction capability that can suck the soft object under test to form a flat plane
  • User friendly interface with simple graphic control system and 3D pattern display 
  • Automatic fast self calibration capability to ensure the system measurement ability 
  • Provide script measurement function with automatic measurement capability 
  • Switchable interface for Traditional Chinese and English

Chroma 7505-01 is the newest multi-function optical inspection system that equips with the capability of measuring 1D, 2D and 3D at the same time. Penetrating reflection measurement is used for 1D film thickness measurement to measure the non-destructive film thickness on transparent and translucent material. The 2D measurement can perform horizontal scan using High-resolution line scan camera and computer controlled platform with measurement range up to 700mm x 900mm. In the mean time, the stage has vacuum suction capability that can suck the soft display such as touch panel, e-paper and AMOLED to form a flat plane. This system is applicable for various micro nano level and large scale measurements. The 2D defect measurement is able to detect the flaws of bubbles, scratches and foreign objects. The 3D measurement function can analyze the height and depth of 2D defects which was not available in the traditional 2D inspection.

The 3C products nowadays is towards compact size and the associated upstream industries like semiconductor, flat panel, flat display, PCB, soft display, e-paper, OLED, Micro Electro Mechanical Systems (MEMS) and electronic package are requesting smaller 2D/3D measurement size. The accuracy of each measurement size can reflect the product quality and performance, thus the requirements of monitoring the product size and quality during manufacturing is increasing. Chroma 7505-01 is able to provide micro nano level 1D, 2D, 3D multifunctional measurements to satisfy the needs of each industry and research unit, which is the best selection for improving efficiency and saving cost.

Inline AOI system - Model 7505-02

Key Features
  • Applicable for Roll to Roll processes of ITO (Indium Tin Oxide) film, RFID and FPC on-line automatic optical inspection
  • Multiple cameras to do image capture simultaneously, inspection speed up to3mper minute
  • Location control and feedback system to get accurate and clear scan image
  • Equipped with positioning target identification and map corresponding functions
  • Equipped with high resolution line scan camera to check for bubbles, scratches and stains

The 7505-02 Automated Optical Inspection System is integrated with high speed camera to shoot Roll to Roll manufacturing processes of ITO (Indium Tin Oxide) film, RFID and FPC that is Line-scan Image Inspection System with PC-based structure.

The 7505-02 applied visual inspection core technologies like high sensitivity line scan, Line-scan camera, low-aberration distortion lens, high brightness lighting and high speed frame grabber.  It reaches uninterrupted inspection with high speed and 2D surface defect analysis through real-time synchronous trigger frame grab coordinated with defect detection judgment in high speed and accurate memory control technology as well.    

The problem found in the earlier manufacturing process for saving the more cost, reducing the fee of scrap and rework and increasing gross margin percentage.  For the consideration of salary increasing, Automated Optical Inspection (AOI) assists manual inspection to be the tendency of nowadays industry development.  Chroma 7505-02 is a Image Inspection System specially for detecting soft material or defect on the film that can replace partly labor

Chroma 7505-02 is designed to be a detection station for the uninterrupted entire manufacturing process.  Use the existed CAD files for comparison that flow rate of entire manufacturing process will be up to3mper minute.  Update CAD file synchronous to meet the development of customer product following various product specifications of manufacturing processes. 

 

Multi-Functional Optical Measuring System - Model 7505-05

Key Features
  • Applies to Mobile phone cosmetic、battery、CG quality testing
  • Equipped with High-resolution camera for 2D dimension measuring
  • Equipped with Line-Laser sensor for 3D dimension measuring
  • Integrated with 2D & 3D measurement in one system
  • Tunnel measurement design for High measurement speed
  • Provide immediate histogram to show the quality of each test items immediately.
  • SPC analysis function
  • CNC knife pattern removal technique

Chroma 7505-05, Multi-Functional Optical Measuring System. Applies to Mobile phone cosmetic、battery、cover glass quality testing. 7505-05 uses 2D image and 3D laser dimension measurement technology to measure 2D and 3D dimension. 2D image dimension measurement is mainly to measure the specific dimension and relative distance of DUT. 3D laser dimension is mainly to measure the height, depth and specific distance of DUT. 7505-05 also provides measurement data save function to engineer or operator for the analysis.

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3D Optical Profiler - Model 7503

Key Features
  • Up to 0.1 nm height resolution for measurement
  • Use white light interference measurement technique to do nondestructive and rapid surface texture measurement and analysis
  • Modulized design to select parts based on test demands or budget concerns
  • Work with color or monochrome camera to do 2D measurement and enable the measuring microscope function
  • Equipped with electric nose gear to mount various lens for switch programmatically
  • LED or halogen light source for selection
  • Measurement range 150 mm x150 mm
  • Integrate low magnification lens (5X & 2.5X ratio) for large area 3D measurement
  • Provide various surface measurement parameters, such as sectional difference, included angle, area, dimension, roughness,waviness, film thickness and flatness
  • Equipped with dark point and boundary error correction algorithms
  • Friendly user interface with simple graphical control system and 3D graphics display
  • Exchangeable file format to save and read various 3D profile file formats
  • Powerful STA (Surface Texture Analysis) Master software providing more than 150 lines and surfaces profiling parameters
  • Automated rapid self calibration to ensure the system’s measurement capability
  • Provide Chinese/English user interface for switch
  • Provide measurement script for auto test

Chroma 7503 is a sub-nano 3D Optical Profiler developed using the technology of white light interference to measure and analyze the surface profile of micro-nano structures with sophisticated scanning system and innovative algorithms. It can work with color or monochrome camera as required for 2D and microscope measurements.

The latest system modular design of Chroma 7503 has flexible configurations that can comply with diversified test applications. When equipped with electric nose gear, maximum 5 types of lens can be mounted and switched directly for use without changing manually. In addition the equipped electrical adjustment mobile platform is able to adjust and position the sample automatically. The large scanning range of vertical and horizontal axis is applicable for various auto measurements. Nondestructive and rapid surface texture measurement as well as analysis can be done on the sample without any preprocessing that is most suitable for R&D, production, process improvement and academic research.

The height resolution Chroma 7503 is up to 0.1 nm and it can achieve 100mm when Z vertical axis is used to measure the scanning stroke. Also the horizontal axis is able to reach sub-micro resolution with scanning range up to 150 × 150mm when a PC is used to control the mobile platform as demand. The fast calibration procedure and algorithm theory enables the system calibration result to be traced to NIST standard. Combined with several innovative, robust and reliable algorithms, Chroma 7503 has the quality of high precision and large scale measurement.

The configured auto scanning platform is able to find the best focus position via the automated vertical axis mobile platform with rapid autofocus algorithm. Moreover, the tilt adjustment platform is able to level the unit under test within a few seconds without complex operations.

The commercial whi te l ight inter ference analyzers frequently use the centroid algorithm to calculate the surface height. Since the light diffraction causes incorrect height calculation of some positions and results wrong profiling data. Chroma 7503 applies the most advanced 3D Profiler Master software along with the inter ference s ignal proces s algor i thm of Chroma to analyze the spectrum of white light interference and prevent the boundary error problem. The system has dark point process function to filter out and correct the data that is incapable of creating interference to reduce the error in measurement. Since the dark point process runs while the data is retrieving, the dark point filter function can be executed effectively; meanwhile the correction is made by referencing the surrounding data that makes the measurement more robust and reliable.

STA (Surface Texture Analysis) Master software analyzes and corrects the data of surface texture, also provides complete profiles in icon. It has more than 150 lines or surfaces profiling parameters including roughness, ripple, flatness, apex and valley. The high pass filter, low pass filter, fast Fourier transformation and cusp removal space filter tools allow the user to filter out the high/low/ bandpass signals. The software has polynomial fitting, region growth, the entire surface and multiple area leveling tools that can used in data processing and analysis flexibly.

In many hi-tech industries such as semiconductor, flat panel display, fiber communication, MEMS, biomedical and electronic packaging, the accuracy of micro structure sur face texture determines the performance and function of the product, thus it needs to be monitored for quality during manufacturing. Chroma 7503 has many surface measurement parameters such as section height, included angle, area, dimension, roughness, ripple, film thickness and flatness that can meet the requirements of the industries and R&D units.

Chroma 7503 has 2D and 3D measurements with fast switch of ratio and large area map interlinking function that can cope with various applications’ needs. Furthermore, the flexible modular design allows customization for practical use to gain the balance between price and performance. Chroma 7503 is the best choice for improving efficiency and saving cost.

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Automatic Optical Solar Cell/Wafer Inspection System - Model 7200 series

Key Features

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Solar Wafer Geometry and Surface Inspector - Model 7201

Key Features

The Chroma 7201 was designed to measure wafer lengths, widths, diagonal, orthogonal and chamfer size and angle, it is also capable to detect surface stains. User friendly software and GUI enable versatile parameter settings and result, it also provides defect display and storage function for further analysis or potential MES/CIM integration.

 Illustration on 7201 inspection items

A: Side length
B: Chamfer length
C: Diagonal
D: Orthogonal
E: V-cut
F: Stain

Solar wafer quality inspector - Model 7202

Key Features

In the design of 7202, Chroma come out a unique optical design that ensures the result of grain-size calculation is highly repetitive. Since the classifcation of different grain-size could be quantified, the inspected wafers can be applied to the proper cell manufacturing lines to get highest possible cell efficiency.

Pinhole defect can also be detected by 7202. The pinhole defect is known to be cause of μ-crack or severe local shunting that will lead to reliability issue to the PV module.

Examples on the grain-size inspection result on 7202

Examples on the grain-size inspection result on 7202

Solar Cell Front-side Printing and Surface Defect Inspector (High-Speed) - Model 7212-HS

Key Features

Chroma 7212-HS is a linescan AOI inspector used to provide superior PV cells defect inspection. As the fine grid printing process goes even faster than before, a reliable printing quality inspector is inevitable to reduce the cost during the PV cells metallization. Chroma 7212-HS provides 14 μm/pixel resolution that could stops even the finest finger interruptions during the metallization process, and also feed back to the operator for instant response to improve the production yield rate.

We could also use Chroma 7212-HS with 20μm/pixel resolution to make the final quality judgment on the PV cell sorting process. Optical design in Chroma 7212-HS is even better, it provides superior inspection result for defects like stain and finger prints, which had been always a hurdle in other PV AOI products.

Solar Cell Backside Printing and Surface Inspector - Model 7213-AD

Key Features

Defects causes by back-side printing process of c-Si PV cells will also cause performance, reliability impact. Among all the back-side printing defects, bumps caused by improper printing may cause high cell breakage rate during lamination of c-Si module process. Chroma 7213-AD c-Si cell back-side printing inspector uses unique lighting technique to detect common back-side printing defects plus most demanding bumps.

Another model Chroma 7213, with same inspection capability but was designed for special upward-detection. This brings unparallel advantage against conventional downward-detection design. With upward detection, the cell can be checked without being flipped twice which helps to minimize the cell breakage and reduce the production line length.

Same as Chroma 7212-HD, Chroma 7213-AD can be used after back-side process to retire cells with major defects. It can also be integrated to in-line or off-line sorter for final inspection prior to shipping.

Solar cell BACKside Printing and Surfa ce Inspector

Anti-reflection Coating Inspector - Model 7214-D

Key Features

Chroma 7214-D is the inspector for Anti-reflection coating process. With 4M mono CCD and Chroma's experience RGB illumination design, we could assure that each defined defectives could be identified through our specified combination. The 7214-D anti-reflection inspector could be applied in discovering (1) Color difference, (2) Brownish stains, (3) Stripe shape watermark, (4) Particles, (5) Belt mark, (6) Acid mark, (7) Stacking cells, (8) Chipping.

With our flexible and hierarchy software design, customer could set up the criteria to inspect their unique defect that is generated because of different PECVD machines.

Solar cell Anti-reflection coating inspector

Solar wafer sawmark inspector - Model 7231

Key Features

Sawmarks happened during the wafering process because of the impurities or vibration of the wires. It happens sometimes in near the edge and sometimes in the center. By following the British standard of EN 50513 2009, Chroma is able to provide the solution that also sense the sawmarks in the center.

Sawmark inspection methodology

Wafer Inspection System - Model 7935

Key Features:

Chroma 7935 wafer inspection system is an automatic inspection system for after-dicing wafer chip. The appearance defects of wafer chip are clearly conspicuous by using advanced illumination technology. Illumination and camera acquisition mode can be adjusted for various wafer chip, like LED, CMOS image sensor and laser diode.

Applied with high speed camera and inspection algorithms, Chroma 7935 can inspect a 2” LED wafer in 4.5 minutes; the throughput is about 35msec/ chip. Chroma 7935 also provides auto focus and warpage compensation function to overcome wafer warpage and chuck leveling issue. There are three magnifications for selection by applicable chip size or defect size. The minimum resolution of the system is 0.7um that has capability to detect 2 um defect size.

System Function 
After the tape expansion process, the arrangement of dies on wafer may be formed an irregular alignment. Chroma 7935 also offers software alignment function to adjust wafer alignment angle for scan. In addition, Chroma 7935 owns a friendly user interface to reduce user’s learning time. All of inspection information is visualized for easy reading, like mapping map, defect region, inspection results.

Defect Analysis 
All of inspection result raw data are recorded not only pass/fail and bin data. This is easily to analysis an optimal parameter that achieves the balance overkill and underkill. The data also helps to monitor the defect trend caused by the production process, and feedback to production unit in advance.

In conclusion, Chroma 7935 is an ideal cost and performance selection for wafer chip inspection process.

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Double Sided Wafer Inspection System - Model  7936

Key Features

Chroma 7936 double sided wafer inspection system is an automatic inspection system for afterdicing wafer chip. It can do double side inspection simultaneously. The appearance defects of wafer chip are clearly conspicuous by using advanced illumination technology. Illumination and camera acquisition mode can be adjusted for various wafer process, like vertical chip or flip chip.

Applied with high speed camera and inspection algorithms, Chroma 7936 can inspect a 2" LED wafer in 4.5 minutes; the throughput is about 35msec/ chip. Chroma 7936 also provides auto focus and warpage compensation function to overcome wafer warpage and chuck leveling issue. There are two magnifications for selection by applicable chip size or defect size. The minimum resolution of the system is 0.7um that has capability to detect 2 um defect size.

System Function 
After the tape expansion process , t h e arrangement of dies on wafer may be formed an irregular alignment. Chroma 7936 also offers software alignment function to adjust wafer alignment angle for scan. In addition, Chroma 7936 owns a friendly user interface to reduce user's learning time. All of inspection information is visualized for easy reading, like mapping map, defect region, inspection results.

Defect Analysis 
All of inspection result raw data are recorded not only pass/fail and bin data. This is easily to analysis an optimal parameter that achieves the balance overkill and underkill. The data also helps to monitor the defect trend caused by the production process, and feedback to production unit in advance.

In conclusion, Chroma 7936 is an ideal cost and performance selection for wafer chip inspection process.

Wafer Chip Inspection System - Model 7940

Key Features

Chroma 7940 wafer chip inspection system is an automated inspection system for postdiced wafer chip inspection. It is capable of inspecting both top and bottom view of the wafer chip simultaneously. Utilizing an advanced illumination technology and color camera acquisition, the system can be customized for various wafer processes and test configuration such as vertical chip or flip chip inspection.

With high-speed camera and inspection algorithms, Chroma 7940 can inspect up to 6" wafer in 3 minutes with a throughput of up to 15 msec./chip. It provides auto focus and compensation for wafer warpage and leveling of an uneven chuck. 
2X and 5X magnifications with 1.3μm/pixel and 0.5μm/pixel resolutions respectively are used to detect various defects down to 1.5μm in size

.

System Function

After tape expansion, individual chip orientation may become irregular and chip realignment is needed during the inspection process. Chroma 7940 includes a software alignment function that automatically adjusts wafer alignment angle for precision scanning. The system comes with an easy-to-read and user-friendly interface that significantly reduces user's learning time while providing visual wafer mapping of defect regions and inspection result.

Defect Analysis

Besides pass/fail inspection and bin data, all raw data for the inspection result may be recorded for further analysis. This database makes it easy to analyze and obtain optimal parameters for balancing the over-kill and under-kill. It is also used to monitor defect trend caused by the production process, therefore capable of providing advanced feedback for production control.

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Video Microscope - Model 7310

Key Features:
 
FUNCTIONS
  • Handy Type Easy to Operate 
    It can be held by hand easily to view the object in clear image without adjusting the focus
  • Picture Freeze 
    You can freeze the frame and release it easily by touching the frame freeze button on the handle. Besides, you are also able to use remote cord to freeze the frame via the terminal on the rear panel.
  • Frame Split 
    If you need to compare two objects, you can choose one-two frame on the screen by switching the "Memory" to "2".
  • Measurement for Multiple Masks 
    The mask designed for multiple functions can be used with magnification lens to observe the object with non-contact, contact and oblique for three-dimension effect.
  • Fully Field Use 
    It provides complete lens combination from magnification 5X to 1000X with maximum working distance up to 18cm. To work with appropriate accessories and measurement software, the Measurement Master can meet the different requirements for various industries.
  • Multiple Peripherals Support 
    The 7310 can connect diverse recording media, color displays, and PC environment (with appropriate interface card installed) via the video out terminal. You can select the desired peripheral.

The 7310 video microscope is a color CCD videobased microscope system that allows you to clearly view small objects on any TV monitor or video projector. Unlike conventional optical microscopes that are complicated and intimidating for the viewer to use, the 7310 is an easy-to-use and friendly video-based system. High resolution video viewing eliminates the operator eyestrain and fatigue associated with conventional and binocular microscopes and the unnatural “hologram effect" of optical projection systems.

The 7310 guided LED light surrounds the lens and automatically provides the best illumination for you to obtain the optimum viewing angle and color of the target object on the video monitor. By using the advanced automatic gain control of DSP technology, it gives the user distortion-free microscope quality images.

With the frame freeze button and memory switch, it allows you to freeze the images with one, or one-two frame on the screen. Image retention on hard copy and image storage are possible by simply connecting the video output of 7310 directly to an optional Color Video Printer, Video Tape Recorder (VTR), or Personal Computer (PC with appropriate image capture card installed).

Two illumination heads of contact and non-contact measurement are available. The user can use the one that meets versatile applications of top-view angle or oblique-view angle. The compact size allows it to be hand held for observation anywhere, anytime. More than one person can observe the same clear image on the color monitor for discussion getting the best results and solutions.

The Chroma v ide o mi c ro s cope o f fe r s the sophisticated inspection methods in the applications of semiconductor, SMD PCB, electronics, tab and wire bonding, hybrid circuit, metal works, quality control, textiles, etc. The versatile and easy-to-use product introduces wholly new ways of treatment. It makes you work faster and more effectively than before.

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