GD-Profiler 2™ - Discover a Whole New World of Information

Overview

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

Equipped with an RF source that can operate in pulse mode for fragile samples, the range of applications of the GD-Profiler 2™ goes from corrosion studies to PVD coating process control and it is used in universities as well as in routine metal and alloys production plants.

Features

  • RF-Only generator is Class E standard and optimized for stability and crater shape allowing for real surface analysis.

  • Source can be pulsed with synchronized acquisition for optimum results on fragile samples. The use of an RF source allows analysis of conventional and non conventional layers and materials.

  • Simultaneous optic provides full spectral coverage from 110 to 800nm, including deep UV access to analyze H, O, C, N and Cl.

  • HORIBA Jobin Yvon original, ion-etched holographic gratings assure the highest light throughput for maximum light efficiency and sensitivity.

  • Patented HDD detection provides speed and sensitivity in detection without compromise.

  • Easily accessible sample compartment allows plenty of room for sample loading.

  • Powerful QUANTUM™ software with Tabler report writing tool.

  • CenterLite laser pointer (patent pending) for precise sample loading.

  • Monochromator option available only from HORIBA Jobin Yvon provides the perfect tool to increase instrument flexibility while adding "n+1" capability.

     

Specification

Schematics

GD-Profiler HR™ - Discover a Whole New World of Information

 

Overview

The HORIBA Scientific GD-Profiler HR™ gives the optimum in terms of resolution and number of elements to solve analytical problems even in the most complex matrices.

Features

  • Pulsed RF source and unique double differential pumping for optimum crater shape and resolution.

  • High resolution simultaneous optics (1m focal length) with full spectral coverage from 110 to 800nm, including VUV H, (D), O, C, N and Cl.

  • New generation of HORIBA Jobin Yvon original, ion-etched holographic gratings assure the highest light throughput for maximum sensitivity.

  • Patented HDD detection provides speed and sensitivity in detection without compromise.

  • Easily accessible sample compartment allows plenty of room for sample loading.

  • Powerful QUANTUM™ software with Report generator.

  • Patented CentreLite for precise sample loading.

  • Monochromator option (1m focal length) available only from HORIBA Jobin Yvon provides the perfect tool to increase instrument flexibility while adding "n+1" capability.

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Plasma Profiling TOFMS™ - Discover a Whole New World of Information

Depth Profiling Analysis by Plasma Profiling Time of Flight Mass Spectrometry

HORIBA Scientific novel Plasma Profiling TOFMS (PP-TOFMS) instrument provides the chemical composition as a function of depth of solid materials. This depth profiling technique consists of a glow discharge plasma source that erodes and ionizes sample material coupled to an ultra fast time of flight mass spectrometer.

High-throughput and universal depth profiling tool

The high ionic density of the glow discharge plasma results in a high sputtering rate. In addition the pre-analysis time is very much reduced as sample does not need to be transferred to a high vacuum chamber. As a result, sub-micron thin films can be analyzed in a few minutes.

The use of a radio frequency excitation signal allows analysis of all types of materials ranging from conductive to non-conductive (e.g. thin films on thick glass substrates) and from inorganic to hybrid. A quick sample preparation permits the analysis of coatings on flexible substrates. 

High dynamic range

Mass Spectrometry coupled to a high intensity plasma source results in a highly sensitive technique. A 106 dynamic range is reached at the nanometer depth scale. In-depth or bulk measurements allow to reach sub ppm sensitivity. In addition, thanks to the separation of sputtering and ionization (low matrix effects), a simple internal calibration calculation results in semi-quantitativeresults (atomic concentrations in the correct order of magnitude).

 

Full mass coverage

The great advantage of a time of flight mass analyzer is its capability of recording complete and continuous mass spectra. PP-TOFMS measures a mass spectrum covering all elements of the periodic table every 33 µs. Any element can thus be monitored as a function of erosion time/depth. This means not only zero risk for missing any elemental depth variation but also full probability of detecting the presence of unexpected elements (contamination). Finally all isotopes are recorded, which can be useful in case of isobaric interferences and for studying mechanisms (oxidation, diffusion) through the use of isotopic labeling.